NSF awards two grants to Stevens Institute of Technology for nano/micro device fabrication and nano sensor development
A team from Stevens Institute of Technology has been awarded a grant from the National Science Foundation for the project, “MRI: Acquisition of an Inductively Coupled Plasma Etching System for Nano/Micro Device Fabrication.” The Stevens team includes Yong Shi, the PI, an Assistant Professor in the Mechanical Engineering department; Stefan Strauf, a Professor the Physics department; Eui-Hyeok Yang, an Associate Professor in the Mechanical Engineering department; Frank Fisher, an Associate Professor in the Nanomechanics and Nanomaterials Lab in the Mechanical Engineering department; and Chang-Hwan Choi, an Assistant Professor in the Mechanical Engineering department. The team also includes Professor Adeniyi Lawal (Chemical Engineering); Professors Hongjun Wang and Xiaojun Yu (Biomedical Engineering); and Dr. Daizong Li (Design and Manufacturing Institute)
The grant will be awarded over three years to support the project’s objective, which is to achieve uniform and highly selective anisotropic etching capabilities for research and training in fabrication of micro/nanoscale sensors, actuators and devices at Stevens. By using an Inductively Coupled Plasma (ICP) etching system, the team can greatly augment existing micro/nano fabrication capabilities within the MicroDevices Laboratory. This will have a significant impact on research already being conducted at Stevens, such as nano and micro devices for sensing , communications and medicine , single-electron carbon nanotube memory devices, nanoengineered surfaces for microfluidic and nanobioscience applications, and bottom-up prototyping of microchemical systems .